Consensus-based Multi-Piezoelectric Microcantilever Sensor
The Problem:
Traditionally a micro-cantilever sensor and a laser are used to make measurements of nanoscale motions. The laser must be aligned and optimized to ensure an accurate measurement. This proves to be time consuming and expensive. Furthermore, measures were taken to overcome this problem by introducing a piezoelectric layer. However, this...
Published: 10/6/2022
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Inventor(s): Nima Mahmoodi, Ehsan Omidi
Keywords(s):
Category(s): Technology Classifications > Manufacturing
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